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AIXTRON 2000HT

AIXTRON 2000HT Slide

Make: AIXTRON
Model: 2000HT
Vintage: 1996
Description:
Excellent condition. A Complete & operational system. Turnkey ready project.

Specifications:

1. Nitride configuration (GaN)
2. Planetary reactor with gas foil rotation
3. Throughput: 7 X 2” wafer
4. RF cooling wafers
5. Gases used: N2, H2, SiH4, HCI, and NH3
6. Contains: (7) MO Baths, (4) Lauda-s RM 6, (3) NESLAB RTE-111
7. MO used: TMGa, TMAI, Cp2MGg, TEGa, TMIn
8. PC Controller
9. HP Vectra PC
10. Reactor temperature gauge: Eurotherm
11. Reactor pressure gauge: MKS 600 controller
12. Pressure balance gauge: Eurotherm
13. Temperature controller system: Luxton 100 C Optical Fiber
14. Braun AIX2000HT Glove Box with Siemens
15. SIMATIC Opt 7 Control
16. Huttinger Big 80/50 Generator