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MBE GEN II MOD

MBE GEN II MOD Slide

Make: Varian/Veeco
Model: MBE GEN II MOD
Description:
Excellent condition. A Complete & operational system. Can be sold as Turnkey ready project or As-Is.

Specifications:

1. 3” wafer, 8 sources
2. Indium-free 10 sample holders with different profiles
3. Substrate heater up to 1000 C
4. Substrate manipulator: power supply, temperature controller, and servo motor control unit
5. Clean chamber and can be used for any materials
6. All sources are on 4.5” flanges
7. Effusion cells can be configured as required
8. Two valved crackers (as required)
9. RF plasma source for either nitrogen or oxygen
10. Growth chamber pumps: 400 l/m ion pump and 10” cryo pump
11. Prep chamber pumps: 220 l/m ion pump
12. Load lock pumps: Sorption, mechanical, and turbo pumps
13. Three ion gauges and controllers
14. RHEED and QMS systems
15. Pyrometer
16. New software and PC
17. Bake out panels