RF Plasma Sources

Exceptional utility for various applications

RF PLASMA SOURCES are used in many applications to produce low energy beams of atomic nitrogen, oxygen, and hydrogen. VESCO-NM RF plasma sources can also be used for doping and semiconductor processing and wafer cleaning applications. Our RF plasma sources demonstrate high dissociation efficiencies enabling growth of high quality MBE nitrides and oxides for electronic and optoelectronic applications. We manufacture RF plasma sources for all gases; Nitrogen, Oxygen, and Hydrogen, as well as deflection plates RF plasma sources. We also make reliable and stable RF matching unit.

Key Features:

Compatible with all MBE and processing machines
Plasma strikes at low power
Very stable plasma modes
Long-time continuous operation
No brazing between gas injection tube and plasma chamber
Easy to operate and to install
Replaceable crucibles and inserts
Unique design for plasma chamber and insert
Interchangeable aperture disks for different applications
Competitive prices

Specifications:

Plasma sources for Nitrogen, Hydrogen, and Oxygen
PBN crucibles for Nitrogen and Hydrogen
Quartz crucible for Oxygen
Mounting flange: 4.5” (other as required)
In-Vacuum length: 12.5” (other as required)
Outside length: 8.625”
In-vacuum tube diameter: 2.250”
Optional: Deflection plates

Nitrogen RF Plasma Source

Nitrogen Plasma Results & Data:

Ease to replace PBN crucible

Plasma Striking At 275 W & Remains Stable At 15 W

Oxygen RF Plasma Source

Ease to replace PBN crucible

Oxygen Plasma Results & Data:

Plasma Striking At 175 W

Hydrogen RF Plasma Source

Hydrogen Plasma Results & Data:

Deflection Plates RF Plasma Sources

Nitrogen Plasma Results & Data for Source With Deflection Plates:

RF Plasma Components

We supply complete RF plasma systems including RF matching unit, water cooling assembly, RF power supply, and leak valves

Specifications:

Dimensions: 9” X 7” X 3.5” (L, W, H)
Weight: 6.5 Kg
RF Input connector: Coaxial RF connector
RF output connector: Copper strap
AC power for cooling fan: 110V-220V AC
Frequency: 13.56 MHz
Reflected power: depends on input power
Tuning time: Less than 5 seconds
Tuning range: Depends on tuning coil
Stability: No oscillations