VESCO-ULTIMA 310 MBE SYSTEM

MBE system for up to 3 inches samples with 10 ports for a combination of 10 sources and effusion cells. This system is exceptionally versatile with high functionality suitable as a research and production tool for III/V, II/VI, and other materials. The VESCO-ULTIMA 310 is the state-of-the-art MBE system which enables growth for many applications with fully automated wafer transfer options.

Specifications

Wafer size up to 3 inches with face down geometry

Wide range of 10 sources options (valved crackers, plasma source, and effusion cells)

Substrate heater up to 1200°C

In-situ characterization capabilities (RHEED, QMS, flux monitor, pyrometer, and Ellipsometry)

High capabilities for growing different materials in one chamber

View ports with integrated heaters, LED, and Cameras

Easy to move, operate, and install (three vacuum chambers on two separate carts)

Small footprint, space, minimum power and utilities consumption

High reliability and efficacy

Easy wafer loading, unloading, and transfer

Automatic or manual operation

Separate and movable flux monitor

Full electronic cabinet

Well-organized wires and cables

Competitive price

Efficient UHV pumping stations with base pressure less than 5 E 10^-11 mbar

Optimized growth geometry to achieve long growth campaigns and high layer uniformity

LN2 cooling shroud

Technical Data

Growth Chamber Size	22” OD, 24” height
Buffer Chamber Size	28” OD, 10” height
Load Lock Chamber Size	6-way 8” cross
Wafer Cassette Size	Two cassettes, 8 sample holder each
Buffer Chamber Capacity	8 sample holders 36 degrees apart
Substrate Size	up to 3 inch
System Pumping Stations	Growth chamber: Cryo, ion, and TS pumps Buffer chamber: Ion and TS pumps Load lock: turbo and scroll pumps
Cooling Shroud	LN2 or other cooling liquid
Substrate Heater Temperature	Up to 1200 °C
Bakeout Temperature	Up to 200 °C
Sources Port Sizes	4.5” CF flange
Types of Sources	Effusion cells, valved crackers, RF plasma sources, e-beam sources, sublimation sources, and gas injector sources
Shutters	Magnetically coupled liner shutters
In-situ Monitoring	Ion gauge, QCM, pyrometer, RHEED, QMA
Sample Transfer	Robot transfer arm with azimuth and z travels
Service	System installation and acceptance testing
Training	By MBE experts